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The purpose of this Document is to standardize requirements for tetraethylorthosilicate used in the semiconductor industry and testing procedures to support those standards
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本スタンダードは，global Flat Panel Display Committeeで技術的に承認されている。現版は2006年5月16日，global Audits and Reviews Subcommitteeにて発行が承認された。2006年6月にwww
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C04900 - SEMI C49 - Guide for Trimethylborate StdDcs-Withdrawn The purpose of this DocumentThis Standard was technically approved by the Liquid Chemicals Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 27, 2010. Available at www. semi. org in November 2010; originally published in 1995; previously published November 2005. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive