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associated with its use
This edition was approved for publication by the global Audits & Reviews Subcommittee on April 25
本文書は2008年9月に，誤字を訂正するため，編集上の修正がなされた。変更箇所は，¶6
SEMI T5-96E (editorial revision)
S02900 - SEMI S29 - 불소계 온실가스(F-GHG) 배출 특성 표시 및 저감을 위한 가이드 Revision:SEMI S29-0712 - Inactive associated with its use, (Environmental, Health & Safety Committee) . (Audits and Reviews Subcommittee) 2012 6 18 2012 7 www. semiviews. org www. semi. org . NOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any language, the English version is the official and authoritative version. : , , . krstandards@semi. org. . (ME) (F GHG) . (abatement tool) F GHG (DRE) . ME (abatement tool) . (GHG) CF4,