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SEMI C28-0618 (technical revision)
It is intended to establish a common basis for developing design specifications and decisions concerning planning and design of water reuse systems
which will reference performance and method standards as well as recommended practices
thus allowing immediate hook-up of the equipment upon arrival in the wafer fab
S02800 - SEMI S28 - 針對預計應用於半導體生產設備之機器人與之安全指導方針 Revision:SEMI S28-1011 - Inactive SEMI C28-0618 (technical revision)(Environmental Health & Safety Technical Committee)2011912201110www. semiviews. orgwww. semi. org "" """""""""""""" (SME) SEMI S2 SME SME SME (FOUP)(SMIF) SME 8 1. 2. 3. 4. 5. 6. 7. WHR() 8. Referenced SEMI Standards SEMI E1. 9 Mechanical Specification for Cassettes Used to Transport and Store 300 mm Wafers SEMI E19. 4 200 mm Standard Mechanical Interface (SMIF) SEMI E62 Specification for 300 mm Front Opening Interface Mechanical Standard (FIMS) SEMI