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where the metal detection limits are 108 to 1010 atoms/cm2
SEMI F19 — Specification for the Surface Condition of the Wetted Surfaces of Stainless Steel Components
To comply with this Specification
E 本文書は2007年2月に編集上の修正がなされた。変更箇所は，¶ R2-2
E19100 - SEMI E191 - Specification for Computing Device Cybersecurity Status Reporting StdTpc-Sapphire where the metal detection limits* This Standard has the option to purchase the Current document with a redline document (Current + Redline). The redline document is included with the Current document as a comparison tool to help identify changes that have been made between the Current version and the previous version (Superseded). If differences should exist between the redline document and the Current document, the Current version is the official and authoritative version. 1
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