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E16200 - SEMI E162 - 450 mmフロントオープニング・シッピングボックス・ロードポートのためのメカニカルインタフェースの仕様 StdVol-Equipment Automation Hardware SEMI E70-1103 (technical revision)

SKU: 98169671701

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Description

SEMI E70-1103 (technical revision)

SEMI S10-1296 (first published)

1  This Standard applies to data collection related to the portion of equipment recipe execution that directly affects the processing locations (process modules and process areas) within production equipment

3  This process data reporting capability provides a factory’s applications the means of linking sampled time series data (Traces) and summary process data to related context data

E16200 - SEMI E162 - 450 mmフロントオープニング・シッピングボックス・ロードポートのためのメカニカルインタフェースの仕様 StdVol-Equipment Automation Hardware SEMI E70-1103 (technical revision)global Physical Interfaces & Carriers Committee2010827global Audits and Reviews Subcommittee201111www. semiviews. org www. semi. org201111 450mmFOSB SEMI450mm FOSB Referenced SEMI Standards SEMI E154 Mechanical Interface Specification for 450 mm Load Port SEMI M80 Mechanical Specification for Front Opening Shipping Box Used to Transport and Ship 450 mm Wafers

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