Production equipment for microsystems. Interface between end effector and handling system subscription-only Dust CADR = 10 cfm

Dust                           CADR = 10 cfm

It describes the functional requirements of pipeline systems and provides a basis for their safe design

2 Surface condition

including over 400 controls covering capture

Production equipment for microsystems. Interface between end effector and handling system subscription-only Dust CADR = 10 cfm1 Scope This International Standard specifies provisions for the interface between end effector and handling systems in production equipment for microsystems. It specifies principal deviations, tolerances and designations for manually and automatically changeable end effectors. The aim is to specify the end effector interface in three levels with an increasing degree of specification.