E02200 - SEMI E22 - Specification for Cluster Tool Module Interface: Transport Module End Effector Exclusion Volume StdPbc-0918 SEMI E84-1109 (technical revision)

SEMI E84-1109 (technical revision)

SEMI MF1535 — Test Method for Carrier Recombination Lifetime in Silicon Wafers by Noncontact Measurement of Photoconductivity Decay by Microwave Reflectance

The box opener/loader unit would include one or more load ports (that would conform to SEMI E15

org June 2003

E02200 - SEMI E22 - Specification for Cluster Tool Module Interface: Transport Module End Effector Exclusion Volume StdPbc-0918 SEMI E84-1109 (technical revision)NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. The purpose of this Specification is to provide sufficient detail to allow the transport module end effector to move wafers to and from process and cassette modules in a cluster tool without mechanical interference. This