C00306 - SEMI C3.6 - Specification for Phosphine (PH3) in Cylinders, 99.98% Quality Revision:SEMI C3.6-0710 (Reapproved 0815) - Superseded 購入者と計測機器メーカや製造者間での効果的な情報伝達や誤解防止のために，明確で一般に認められる用語の定義が必要である。この文書の目的は，

購入者と計測機器メーカや製造者間での効果的な情報伝達や誤解防止のために，明確で一般に認められる用語の定義が必要である。この文書の目的は，

replaced by SEMI C70

• Transfer of general-purpose data between equipment

previously published July 2005

C00306 - SEMI C3.6 - Specification for Phosphine (PH3) in Cylinders, 99.98% Quality Revision:SEMI C3.6-0710 (Reapproved 0815) - Superseded 購入者と計測機器メーカや製造者間での効果的な情報伝達や誤解防止のために，明確で一般に認められる用語の定義が必要である。この文書の目的は，The purpose of this Document is to provide specifications for phosphine (PH3) that are used in the semiconductor industry. This Document covers requirements for phosphine used in the semiconductor industry. Referenced SEMI Standards (purchase separately) SEMI C3 Specification for Gases Revision History SEMI C3. 6 0421 (technical revision) SEMI C3. 6 0710 (Reapproved 0815) SEMI C3. 6 0710 (technical revision) SEMI C3. 6 0701 (technical revision) SEMI