P04800 - SEMI P48 - Specification of Fiducial Marks for EUV Mask Blank StdPbc-1014 SEMI M9 — Specification for

SEMI M9 — Specification for Polished Monocrystalline Gallium Arsenide Wafers

SEMI E84-0701 (technical revision)

grain boundary

thin film head

P04800 - SEMI P48 - Specification of Fiducial Marks for EUV Mask Blank StdPbc-1014 SEMI M9 — Specification forThis Standard specifies key requirements of fiducial marks that can be used as a coordinate system for referencing defect locations on extreme ultraviolet (EUV) blanks. This Standard is intended to set an appropriate level of technical specifications of mask fiducial marks, such as their locations, shapes, sizes, line dimensions, and limits of variation. The marks must be readable by mask metrology and pattern write tools. This Standard is not