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C00318 - SEMI C3.18 - Specification for Dichlorosilane (SiH2Cl2) in Cylinders, 97% Quality StdPbc-0218 total thickness variation (TTV)

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Description

total thickness variation (TTV)

a procedure is described for qualifying certain moisture analyzers considered suitable for use in qualifying moisture standards

この文書は,FPD用マスクの欠陥用語を定義する。このスタンダードにより,技術会議や商談の場などで使用される用語が明確になり,マスクに関する標準化が促進されることをねらいとしている。

the actual wafer diameter may differ slightly due to process requirements

C00318 - SEMI C3.18 - Specification for Dichlorosilane (SiH2Cl2) in Cylinders, 97% Quality StdPbc-0218 total thickness variation (TTV)NOTICE: This document was replaced by SEMI C56 in 2005. The purpose of this document is to provide a specification for Dichlorosilane (SiH2Cl2) used in the semiconductor industry. This document covers requirements for Dichlorosilane (SiH2Cl2) used in the semiconductor industry. If analytical methods are not complete, the requirements are presented as a guideline. Referenced SEMI Standards None.

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