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This Specification applies to photomasks that are principally used in fabricating flat panel displays
SEMI E158 — Specification for Mechanical Features of Fab Wafer Carrier Used to Transport and Store 450 mm Wafers (450 FOUP) and Kinematic Coupling
FPD基板が静的に保持された場合の物理的搬送に関する用語とその定義を定める。
SEMI E39 — Specification for SECS-II Protocol for Object Services (OSS)
C01900 - SEMI C19 - Specification for Acetone Revision:SEMI C19-0514 - Superseded This Specification applies to photomasksNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. 1 Purpose 1. 1 The purpose of this Standard is to standardize requirements for acetone used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically